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Sponsors:
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Audience:
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Scientists
and engineers from industry, government, and academia interested
in semiconductor metrology for nanoelectronics.
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Format:
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Formal
invited presentation sessions and poster sessions. |
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Purpose:
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This conference
represents a paradigm shift from the previous conferences in that
our emphasis is on frontiers and innovation in characterization
and metrology. Our goal is to bring together scientists &
engineers interested in all aspects of the technology & characterization
techniques for nanoelectronic materials & device research,
development, manufacturing, and diagnostics.
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Topics:
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Metrology
for Nanoelectronics Materials & Devices; Ultra-Shallow Junctions;
Dopant Concentrations; Alternate State Devices; Alternative Gate
Dielectrics; Thin-Film Nano-Metrology; Interconnects and Barrier
Layers; Etch Damage at the Nanoscale; Nanoscale Stress; Nano-Lithography
and Bottlenecks; Role of Defects in Nanoelectronics; Nano-Manufacturing
and Challenges; Nano-Diagnostics; In-Situ, Real-Time Nano-Control
and Monitoring; Integrated Metrology; Critical Analytical Techniques;
Novel Measurement Methods, Breakthroughs at the Nanoscale; Contamination,
Detection, and Identification; Modeling/Simulation; Nano-Fab Metrology;
MEMS/NEMS Metrology Applications; 300 mm Metrology.
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Technical
Contact:
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David G.
Seiler, NIST, Gaitherburg, MD, phone: 301-975-2074, e-mail:
David G. Seiler
Erik Secula,
NIST, Gaitherburg, MD, phone: 301-975-2050, e-mail:
Erik Secula
Lori Guariglia,
NIST, Gaitherburg, MD, phone: 301-975-2054, e-mail:
Lori
Guariglia
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Website:
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www.eeel.nist.gov/812/conference/ |
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Accommodations:
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A limited
block of rooms is reserved at the Gaithersburg Marriott Washingtonian
Center, Gaithersburg, Maryland. The room rate will be the prevailing
government rate at the time of the conference (approximately $180
plus applicable taxes per night). Reservations must be made by
March 8, 2007, to guarantee a room. Rooms at this special
rate are available only on a first-come, first-serve basis, so
make your reservation early!
The phone
number for reservations is (800) 599-5111. Be sure to idenfity
yourself as being with the Frontiers for Nanoelectronics Conference
to ensure you receive the reduced rate.
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