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NIST Home > PML > Manufacturing Programs/Projects in PML

Manufacturing Programs/Projects in PML

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Advanced Linear and Nonlinear Optical Metrology in support of next-generation Lithography

Antenna Metrology

Atom-Based Standards and Fabrication

CMOS Device and Reliability

High-Throughput Nanometrology with Scatterfield Microscopy

Implement Robotic Mass Measurements in SP250 Services

International System of Units (SI)

MEMS Measurement Science and Standards

Metrology for Advanced Optics

Nanoelectronic Device Metrology

Nanometer Scale Dimensional Metrology

Nanoparticle Manipulation Metrology

Optical Linescale Metrology

Overlay Instrument and Wafer Target Designs

Photomask Dimensional Metrology

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Date created: December 17, 2009 | Last updated: October 5, 2010    Contact: Webmaster