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Steve Grantham

Research Interest:

  • EUV Lithography
  • EUV reflectometry
  • EUV radiometry
  • Detector development

Biography:

Steve Grantham received his Ph.D. from the University of Central Florida’s Center for Research and Education in Optics and Lasers (CREOL). His graduate research involved the study and application of short pulse laser produced plasmas. Since 1999 he has worked at NIST with an emphasis on EUV metrology for EUV lithography applications.

Awards:

  • Department of Commerce Silver Medal, 2004
  • William P. Slichter Award, 2007
Selected Publications
Latest Publications
Staff photo of Steve Grantham

Position:

Physicist
Sensor Science Division
Ultraviolet Radiation Group

Employment History:

NIST, August 2000 - present
 
Rensselaer Polytechnic Institute/ NIST
Postdoctoral Research Associate, June 1999-August 2000
 
Center for Research and Education in Optics and Lasers
Graduate Research Assistant, August 1992 – June 1999
 
NIST, Visiting Researcher, Summer 1992 & Summer 1993
 
Department of Electrical and Computer Engineering, The Johns Hopkins University, Independent Contractor, Summer 1991

Education:

Ph.D. in Optical Sciences and Engineering, The University of Central Florida/CREOL, Orlando, Florida, August 1999
 
M.S.E.E. (Electro-Optics Emphasis), The University of Central Florida/CREOL, December 1993

B.S.E.E., The Johns Hopkins University, Baltimore, Maryland, May 1991

Contact

Phone: 301-975-5528
Email: grantham@nist.gov
Fax: 301-208-6937