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Steve Grantham

Steve Grantham received his Ph.D. from the University of Central Florida’s Center for Research and Education in Optics and Lasers (CREOL). His graduate research involved the study and application of short pulse laser produced plasmas. Since 1999 he has worked at NIST with an emphasis on EUV metrology for EUV lithography applications.

Research Interest:

  • EUV Lithography
  • EUV reflectometry
  • EUV radiometry
  • Detector development


  • Department of Commerce Silver Medal, 2004
  • William P. Slichter Award, 2007
Staff photo of Steve Grantham


Sensor Science Division
Ultraviolet Radiation Group

Employment History:

2000, NIST, Gaithersburg, MD
1999-2000, Rensselaer Polytechnic Institute, Troy, NY


Ph.D.  Optical Sciences and Engineering, The University of Central Florida/CREOL, Orlando, FL
M.S.  Electrical Engineering, The University of Central Florida/CREOL, Orlando, FL

B.S.  Electrical Engineering, The Johns Hopkins University, Baltimore, MD


Phone: 301-975-5528
Email: grantham@nist.gov
Fax: 301-208-6937