Charlie Tarrio

Research Interests:

• Metrology for extreme ultraviolet lithography
• EUV reflectometry
• EUV dosimetry
• Properties of photoresists under EUV irradiation
• EUV optics contamination
• Trace vacuum analysis
• Gas chromatography with mass spectrometry

Biography:

Charlie Tarrio received a BS in physics and math from Bates College. He earned high honors in physics for his thesis, "A new predictive scheme for rotating superconductors." He received his PhD in physics from the University of Virginia under the tutelage of Steve Schnatterly. He used electron energy loss spectroscopy to study the electronic and optical properties of a wide range of materials. He has been at NIST since 1991 developing and applying metrology for extreme ultraviolet lithography.

Awards:

• William P. Slichter Award, 2007
• Department of Commerce Silver Medal, 2004
• Arthur S. Flemming Award in Applied Science, 2003
• Department of Commerce Bronze Medal, 1994