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Charlie Tarrio

Charlie Tarrio received a B.S. in physics and math from Bates College. He earned high honors in physics for his thesis, "A new predictive scheme for rotating superconductors." He received his Ph.D. in physics from the University of Virginia under the tutelage of Steve Schnatterly. He used electron energy loss spectroscopy to study the electronic and optical properties of a wide range of materials. He has been at NIST since 1991 developing and applying metrology for extreme ultraviolet lithography.

Research Interests:

  • Metrology for extreme ultraviolet lithography
  • EUV reflectometry
  • EUV dosimetry
  • Properties of photoresists under EUV irradiation
  • EUV optics contamination
  • Trace vacuum analysis
  • Gas chromatography with mass spectrometry


  • William P. Slichter Award, 2007
  • Department of Commerce Silver Medal, 2004
  • Arthur S. Flemming Award in Applied Science, 2003
  • Department of Commerce Bronze Medal, 1994
Staff photo of Charlie Tarrio.


Sensor Science Division
Ultraviolet Radiation Group

Employment History:

1991-present, NIST, Gaithersburg, MD

1991, University of Virginia, Charlottesville, VA


Ph.D. Physics, University of Virginia, Charlottesville, VA

B.S. Physics, Bates College, Lewiston, Maine


Phone: 301-975-3737