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Ultraviolet Radiation Group

Welcome
Ultraviolet Radiation thumbnailThe overarching goal of the Ultraviolet Radiation Group is to provide the foundation for metrology and testing in the ultraviolet (UV) spectral region of the spectrum.  This includes the maintenance and continuous improvement of the national primary standards for UV radiation in support of UV-based science and applications and the development of improved measurement and testing techniques for various scientific and industrial applications involving UV radiation. The major program elements include: Absolute UV source-based and detector-based radiometry; metrology and testing related to UV-induced surface modifications; development and characterization of semiconductor-based photon detectors; measurements of optical properties of materials in the UV.  Our activities include: the delivery calibrated photodetectors and lightsources that serve as working standards and transfer standards to industry and research institutions; the delivery of test methods for the study of UV-induced surface chemistry to the industrial developers of EUV lithography; and the calibration of instruments and instrument components used by NASA and NOAA to study the sun and the atmosphere. The key external stakeholders include: NASA; NOAA, DARPA, members of the semiconductor industry, and academic and industrial researchers working with UV radiation.
Programs/Projects

Geostationary Operations Environment Satellite R-Series Program (GOES-R) Extreme UV/X-ray Irradiance Sensor (EXIS) Calibration—Calibrations of the The Extreme ultraviolet/X-ray Irradiance Sensor (EXIS), which will be installed on the Geostationary Operations Environment Satellite R-Series (GOES-R) are performed using …

Ultraviolet Photoemission Electron Microscopy—Ultraviolet photoemission electron microscopy is used to study the field emission of chromium oxide coated carbon nanosheets.

Photodetector Analysis for Biological Agent Detection—Photomultiplier tube (PMT) analysis with respect to PMT sensitivity and long-term stability using synchrotron radiation.

NIST Lyman-Alpha Neutron Detector (LAND)—The well-known interaction of low-energy neutrons and 3He produces a proton and a triton with 764 keV of kinetic energy shared between the two particles. For many years, this reaction has been used …

Synchrotron Radiation-Based Calibrations for Space Weather Prediction—Orbital ultraviolet and extreme-ultraviolet spectrometers are calibrated on beamline 2, taking advantage of the calculability of synchrotron radiation.

Bilateral Comparison of Spectral Responsivity in the Vacuum-Ultraviolet—To compare the calibration capabilities for the spectral responsivity in the vacuum-ultraviolet spectral region between 135 nm and 250 nm, PTB and NIST agreed on a bilateral comparison. …

Long-Term Monitoring of the Ultraviolet Irradiance Scale—In 2004, the National Institute of Standards and Technology NIST established the ultraviolet spectral irradiance scale from 200 nm to 400 nm using the calculable irradiance of the Synchrotron …

Vacuum-Ultraviolet Optical Properties of Cryogenic Water Ices—The optical properties of cryogenic water ices in the vacuum-ultraviolet spectral range are studied.

EUV Detector Calibrations—Transfer standard photodiodes may be purchased with a calibration in the range from 5 nm to 254 nm. Other detectors supplied by the customer may be calibrated if they are suitable for use as …

Synchrotron Radiation-based Ultraviolet Source Calibrations—Bilateral comparison of synchrotron radiation-based deuterium lamp calibrations between the Physikalisch-Technische Bundesanstalt PTB and NIST.

NIST Calibration of SDO/EVE/ESP Rocket Instrument—NASA launched the Solar Dynamics Observatory (SDO) satellite on 11 Feb 2010 on a mission to study the sun. The EUV Variability Experiment (EVE) on SDO contains the Extreme Ultraviolet …

Highlights

Beaming up on the way to space

UV lithography: Taking extreme measures

Extreme Ultraviolet Reflectivity Measurements

Extreme Ultraviolet Resist Qualification

Extreme Ultraviolet Optics Degradation

euvresist
300 mm silicon wafer with incrementally increasing doses of extreme ultraviolet (EUV) radiation. The seventh exposure was the minimum dose required to fully remove the photoresist.
 
Products and Services
Contact

Ultraviolet Radiation Group:
Thomas Lucatorto, Group Leader
301-975-3734 Telephone

Christina Brown, Secretary
301-975-3727 Telephone
301-208-6937 Facsimile

100 Bureau Drive, M/S 8411
Gaithersburg, MD 20899-8411