Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo
Bookmark and Share

Ultraviolet Radiation Group


Synchrotron Ultraviolet Radiation Facility SURF III

  • Provides our National standards for ultraviolet (UV) and extreme-ultraviolet (EUV) radiometry
    • Monitoring space weather and solar variability
    • Advancing industrial uses – e.g. EUV microlithography, UV curing
  • Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output profile for EUV studies related to solar physics and the development of EUV lithography
  • Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
  • Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
  • Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum

Measurement services and other calibrations

  • Photodiode calibrations from 5 nm to 400 nm and UV source lamp calibrations as through NIST Measurement Services
  • Calibration of all NASA and NOAA solar observing satellite instruments
  • Mirror reflectivity for solar telescopes and EUV lithographic tools


  • UV/EUV-induced optics contamination of optics in space and in EUV lithography tools
  • Establish traceability to the SI units and reduce absolute uncertainties over the whole range 4 nm to 400 nm
  • Optical properties of materials in the VUV and EUV
  • Development and characterization of new detectors and imaging systems in the VUV and EUV
  • Theoretical and experimental treatment of diffraction contributions in source-based radiometry
  • Using improved understanding of synchrotron physics to reduce beam noise to improve suitability of source for infrared microscopy

SDO/EVE/ESP Calibration—NASA launched the Solar Dynamics Observatory (SDO) satellite on 11 Feb 2010 on a mission to study the sun. The EUV Variability Experiment (EVE) on SDO contains the Extreme Ultraviolet …

Degradation of extreme-ultraviolet optics—Optical systems that operate at wavelengths in the ultraviolet (UV) and extreme-ultraviolet (EUV) are susceptible to degradation by a number of different processes that depend on the photon energy, …

Metrology for extreme ultraviolet lithography—Much of the activity of the UV Physics Group is aimed at supporting the R&D effort by the microelectronics industry to develop Extreme Ultraviolet Lithography (EUVL) to pursue the goal set by …

Vacuum-Ultraviolet Optical Properties of Cryogenic Water Ices—The optical properties of cryogenic water ices in the vacuum-ultraviolet spectral range are studied.

Extreme Ultraviolet Detector Calibration Service—The extreme ultraviolet detector (EUVD) calibration service disseminates the U.S. national scale of detector responsivity in the wavelength range from 5 nm to 254 nm. The EUVD service stocks …

EUV Zone Plates for Compact Solar Radiometers—This project is developing zone plate technology to enable compact solar radiometers for observing the solar 30.4-nm emission from ionized helium in the transition region of the sun. Zone plates …

Lyman-Alpha Neutron Detector (LAND)—The well-known interaction of low-energy neutrons and 3He produces a proton and a triton with 764 keV of kinetic energy shared between the two particles. For many years, this reaction has been used …

Synchrotron Radiation-based Ultraviolet Source Calibrations—Bilateral comparison of synchrotron radiation-based deuterium lamp calibrations between the Physikalisch-Technische Bundesanstalt PTB and NIST.

Calibration of the Extreme UV/X-ray Irradiance Sensor (EXIS) for the Geostationary Operations Environment Satellite R-Series Program (GOES-R)—Calibrations of the The Extreme ultraviolet/X-ray Irradiance Sensor (EXIS), which will be installed on the Geostationary Operations Environment Satellite R-Series (GOES-R) are performed using …

Long-Term Monitoring of the Ultraviolet Irradiance Scale—In 2004, the National Institute of Standards and Technology NIST established the ultraviolet spectral irradiance scale from 200 nm to 400 nm using the calculable irradiance of the Synchrotron …

Extreme ultraviolet optical constants—In the vacuum ultraviolet and extreme ultraviolet (EUV), the indices of refraction of all materials become complex: N = n + ik, or N = 1- d + ik. Here, n is the standard index of refraction, which …

Use of a laser-driven plasma source in ultraviolet-detector calibrations—The National Institute of Standards and Technology operates two spectral comparator facilities, both of which are used to provide detector calibrations from the ultraviolet to the near-infrared …

Quantum Dot coated CMOS CID arrays for the UV and VUV—A technique has been developed for coating commercial off the shelf (COTS) detector arrays with a thin, uniform layer of quantum dots. The quantum deposition is accomplished using an Optomec …

Synchrotron Radiation-Based Calibrations for Space Weather Prediction—Orbital ultraviolet and extreme-ultraviolet spectrometers are calibrated on beamline 2, taking advantage of the calculability of synchrotron radiation.

Bilateral Comparison of Spectral Responsivity in the Vacuum-Ultraviolet—To compare the calibration capabilities for the spectral responsivity in the vacuum-ultraviolet spectral region between 135 nm and 250 nm, PTB and NIST agreed on a bilateral comparison. …

A compilation of solar data from various instruments on SDO recording a flare on May 5, 2010.

Images and Spectra of a solar flare taken from the Solar Dynamics Observatory (SDO) Mission launched in February 2010. Top three panels (l to r): Images showing magnetic loops of the solar flare taken at 9.4 nm, 33.5 nm, and 17.1 nm, respectively, taken by the Atmospheric Imaging Assembly (AIA) aboard the SDO; Fourth panel: graphic related to magnetic field strength at the flare taken by the Helioseismic and Magnetic Imager (HMI). Bottom: Time history of flare emission at 9.4 nm and 33.5 nm taken by the Extreme-Ultraviolet Variability Experiment (EVE) instrument. The initial calibration of EVE and the periodic recalibrations through a duplicate EVE on rocket underflights were done at SURF III. The AIA is periodically cross calibrated against EVE.

SURF III Beamlines
 BL-1 | BL-2 | BL-3 | BL-4 | BL-5
 BL-6 | BL-7 | BL-8 | BL-9 | BL-10
Products and Services

Ultraviolet Radiation Group:
Thomas Lucatorto, Group Leader
301-975-3734 Telephone

Christina Brown, Office Manager
301-975-3727 Telephone

100 Bureau Drive, M/S 8411
Gaithersburg, MD 20899-8411