 > Return to SRD 134, Index of Semiconductor Process Gases
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SULFUR
HEXAFLORIDE
|
M.W. [1]
146.056
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N.B.P [2]
222.45 K
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T.P [2]
223.15 K
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SF6
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Pc [2]
3.76 MPa
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Tc [2]
318.7 K
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Vc[3]
0.19582 m3/kmol
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Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
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T
K
|
|
Vapor Pressure
MPa
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B(T)
cm3·mol-1
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dB/dT·T
cm3·mol-1
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C(T)
cm6·mol-2
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dC/dT·T
cm6·mol-2
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λ
mW/(m·K)
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η
µPa·s
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Estimated
Uncertainty
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1%/0.1%
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1%
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Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
5.0%
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0.5%
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Reference
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1/5
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6
|
5
|
5
|
5
|
5
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7
|
7
|
|
223
|
9.17
|
0.23
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-528.8
|
1190.2
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-22326
|
450223
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7.0
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11.76
|
|
225
|
9.25
|
0.25
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-518.2
|
1164.6
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-18470
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413996
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7.1
|
11.86
|
|
230
|
9.43
|
0.31
|
-493.3
|
1104.5
|
-10258
|
335752
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7.4
|
12.09
|
|
235
|
9.61
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0.37
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-470.2
|
1049.6
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-3741
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272172
|
7.6
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12.33
|
|
240
|
9.79
|
0.45
|
-448.6
|
999.3
|
1426
|
220292
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7.9
|
12.56
|
|
245
|
9.97
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0.54
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-428.5
|
952.9
|
5517
|
177801
|
8.2
|
12.80
|
|
250
|
10.09
|
0.64
|
-409.7
|
910.2
|
8747
|
142881
|
8.4
|
13.03
|
|
255
|
10.26
|
0.75
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-392.0
|
870.7
|
11283
|
114101
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8.7
|
13.26
|
|
260
|
10.43
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0.88
|
-375.5
|
834.1
|
13261
|
90319
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9.0
|
13.49
|
|
265
|
10.60
|
1.02
|
-359.9
|
800.1
|
14789
|
70626
|
9.3
|
13.73
|
|
270
|
10.76
|
1.18
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-345.3
|
768.4
|
15952
|
54291
|
9.5
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13.96
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|
275
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10.92
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1.36
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-331.4
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738.9
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16820
|
40723
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9.8
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14.19
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|
280
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11.08
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1.55
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-318.4
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711.4
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17449
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29444
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10.1
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14.42
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|
285
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11.23
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1.77
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-306.0
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685.6
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17885
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20064
|
10.4
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14.65
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|
290
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11.38
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2.00
|
-294.3
|
661.4
|
18164
|
12264
|
10.7
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14.88
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|
295
|
11.53
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2.26
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-283.2
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638.7
|
18317
|
5783
|
11.0
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15.10
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|
300
|
11.68
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2.53
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-272.6
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617.4
|
18368
|
404
|
11.3
|
15.33
|
|
305
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11.82
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2.83
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-262.6
|
597.3
|
18337
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-4049
|
11.6
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15.56
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|
310
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11.96
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3.16
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-253.0
|
578.3
|
18240
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-7727
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11.9
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15.78
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|
315
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12.10
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3.50
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-243.9
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560.4
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18091
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-10750
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12.2
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16.01
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318.7
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12.20
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3.77
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-237.5
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547.8
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17955
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-12628
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12.4
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16.18
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|
320
|
12.23
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-
|
-235.2
|
543.5
|
17902
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-13224
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12.5
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16.23
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|
340
|
12.74
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-
|
-204.1
|
484.2
|
16896
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-19136
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13.6
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17.12
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|
360
|
13.21
|
-
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-177.9
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435.6
|
15733
|
-21118
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14.8
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18.00
|
|
380
|
13.64
|
-
|
-155.4
|
395.3
|
14585
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-21099
|
16.0
|
18.87
|
|
400
|
14.03
|
-
|
-136.1
|
361.3
|
13526
|
-20092
|
17.2
|
19.73
|
|
420
|
14.38
|
-
|
-119.1
|
332.3
|
12580
|
-18635
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18.3
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20.57
|
|
440
|
14.70
|
-
|
-104.3
|
307.3
|
11750
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-17016
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19.4
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21.40
|
|
460
|
14.99
|
-
|
-91.1
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285.6
|
11030
|
-15390
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20.5
|
22.22
|
|
480
|
15.20
|
-
|
-79.4
|
266.6
|
10408
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-13834
|
21.6
|
23.02
|
|
500
|
15.44
|
-
|
-68.8
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249.8
|
9873
|
-12386
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22.6
|
23.81
|
|
550
|
15.95
|
-
|
-46.7
|
215.4
|
8843
|
-9300
|
25.2
|
25.74
|
|
600
|
16.37
|
-
|
-29.1
|
188.8
|
8141
|
-6925
|
27.7
|
27.59
|
|
650
|
16.71
|
-
|
-14.9
|
167.7
|
7661
|
-5121
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30.0
|
29.37
|
|
700
|
16.99
|
-
|
-3.1
|
150.6
|
7334
|
-3752
|
32.3
|
31.08
|
|
750
|
17.22
|
-
|
6.8
|
136.5
|
7112
|
-2709
|
34.4
|
32.73
|
|
800
|
17.42
|
-
|
15.2
|
124.6
|
6964
|
-1910
|
36.5
|
34.32
|
|
850
|
17.58
|
-
|
22.4
|
114.5
|
6867
|
-1295
|
38.4
|
35.84
|
|
900
|
17.73
|
-
|
28.7
|
105.8
|
6807
|
-819
|
-
|
-
|
|
950
|
17.85
|
-
|
34.2
|
98.2
|
6773
|
-449
|
-
|
-
|
|
1000
|
17.95
|
-
|
39.1
|
91.5
|
6758
|
-162
|
-
|
-
|
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- Horvath, A.L., "Physical Properties of Inorganic Compounds"; Crane Russak, New York (1975).
- Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev.(72, 71, 1972).
- "JANAF Thermochemical Tables", J. Phys. Chem. Ref. Data (7, 793, 1978) (1978 Supplement).
- Hurly, J.J., Defibaugh, D.R., and Moldover, M.R., "Thermodynamic Properties of Sulfur Hexafluoride", Int. J. Thermophys. (21, 3, 2000).
- Verdelli, L.S., Miller, H.C., and Gall, J.F., "Some Physical Properties of Sulfur Hexafluoride"; Ind. Eng. Chem. (43, 1126, 1951).
- Strehlow, T. and Vogel, E., "Temperature Dependence and Initial Density Dependence of the Viscosity of Sulphur Hexafluoride", Physica A, (161, 101, 1989).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
John Hurly
301-975-2476 Telephone
john.hurly@nist.gov
Keith Gillis
301-975-2468
keith.gillis@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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