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NIST Home > PML > Semiconductor and Dimensional Metrology Division > Optical Microscopy Programs/Projects in the Mechanical Metrology Division

Optical Microscopy Programs/Projects in the Semiconductor and Dimensional Metrology Division

Comparison and Uncertainty Evaluation of Methods for Asphere Metrology

High-Throughput Nanometrology with Scatterfield Microscopy

Measurement Methods and Services for Optical Reference Surfaces

Measuring Aspheric Optics using Binary Holograms

Measuring the Height Transfer Function of Phase-Shifting Interferometers

Metrology for Advanced Optics

Nano-Structured Optics for Measuring Spherical Surfaces with Large Radii

Nanometer Scale Dimensional Metrology

Optical Linescale Metrology

Overlay Instrument and Wafer Target Designs

Photomask Dimensional Metrology

Wafer Flatness and Wafer Thickness Variation

Semiconductor and Dimensional Metrology Division

Contact

Physical Measurement Laboratory (PML)

Semiconductor & Dimensional Metrology Division
Dr. David G. Seiler, Chief

General Information:
Lori A. Guariglia, Secretary
301-975-2054 Telephone
301-869-6021 Facsimile

100 Bureau Drive, M/S 8120
Gaithersburg, Maryland 20899-8120

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Date created: March 17, 2009 | Last updated: December 15, 2011    Contact: Webmaster