Ms. Cassard is an electronics engineer in the Nanoscale Metrology Group in the Semiconductor & Dimensional Metrology Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST). She began working on MEMS standards activities in 1990. In particular, she concentrated on the development of state-of-the-art metrics for MEMS products. She has produced these improved metrics in collaboration with industry and delivered them to industry and government through her leadership in standards development organizations such as ASTM and SEMI, and through her NIST products, such as E-STANDARDS and the upcoming SRMs. Some particularly useful products grew out of her standards work; the most significant among these being documented in the selected publications.
Semiconductor & Dimensional Metrology Division
Nanoscale Metrology Group