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NIST Home > PML > Semiconductor and Dimensional Metrology Division > Documentary Standards Programs/Projects in Semiconductors

Documentary Standards Programs/Projects in Semiconductors

CMOS Device and Reliability

Comparison and Uncertainty Evaluation of Methods for Asphere Metrology

Complex Geometry Instrumentation and Standards

Dimensional Metrology Program

Improvements in Calibrations and Uncertainty Evaluation

MEMS Measurement Science and Standards

Measurement Methods and Services for Optical Reference Surfaces

Measuring the Height Transfer Function of Phase-Shifting Interferometers

MicroFeature Calibration Development

Micrometer Level Surface Finish Metrology

Optical Comb and Refractometry

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Date created: March 10, 2009 | Last updated: October 3, 2011    Contact: Webmaster