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Frontiers of Characterization and Metrology for Nanoelectronics


The 2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) will be held at the Hilton Dresden Downtown in Dresden, Germany, April 14-16, 2015!


While a city of notable art treasure, architectural sights, and a charming landscape, Dresden also has largest hub of microelectronics in Europe. Dresden is a center of materials science and engineering (more than 2000 materials scientists and engineers at TU Dresden and in several institutes).

The FCMN brings together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in-situ, and real-time control and monitoring. The conference summarizes major issues and provides critical reviews of important semiconductor techniques needed as the semiconductor industry moves to silicon nanoelectronics and beyond.

The conference will consist of formal invited presentation sessions and poster sessions for contributed papers. The poster papers will cover new developments in characterization and metrology especially at the nanoscale.

The conference series began at NIST in 1995. There have been nine conferences in the series.

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Committee Co-Chairs:

  • David Seiler, NIST
  • Alain Diebold, College of Nanoscale Science and Engineering, SUNY Albany
  • Bob McDonald, formerly of Intel (Treasurer)
  • Zhiyong Ma, Intel
  • Ehrenfried Zschech, Fraunhofer Institute for Ceramic Technologies and Systems

Committee Members:

  • Amal Chabli, CEA-Leti
  • Luigi Colombo, TI
  • Michael Current, Current Scientific
  • Ajey Jacob, Global Foundries
  • Toshihiko Kanayama, AIST
  • Shifeng Lu, Micron
  • Ulrich Mantz, Zeiss
  • Lori S. Nye, Brewer Science, Inc.
  • Yaw Obeng, NIST
  • Lothar Pfitzner, Fraunhofer IISB
  • Sesh Ramaswami, Applied Materials
  • Erik Secula, NIST
  • George Thompson, Intel
  • Sandip Tiwari, Cornell University
  • Victor Vartanian, ISMI
  • Wilfried Vandervorst, IMEC
  • Usha Varshney, NSF


For the 2013 conference, we were pleased to have Mike Mayberry, VP and Director of Component Research, Intel; Naga Chandrasekaran, VP of Process R&D, Micron; and Gyeong-Su Park, Leader of Analytical Science Group, Samsung Advanced Institute of Technology, as keynote speakers for the event. Over 30 other invited talks offered overviews in the sessions that followed.


"There were a total of 34 talks and 81 poster presentations that summarized major issues and provided critical reviews of crucial semiconductor developments and techniques needed as the industry evolves to silicon nanoelectronics and beyond."    

- Alex Braun, "A Jaunt Through Nanotechnopolis,"
Semiconductor International, May 20, 2009


"If you want to meet, greet, and learn from the world's experts in metrology, this is the place to be."    

- Dan Hutcheson, The Chip Insider,
January 11, 2007


Start Date: Tuesday, April 14, 2015
End Date: Thursday, April 16, 2015
Location: Hilton Dresden Downtown, Dresden, Germany
Audience: Industry, Government, Academia
Format: Conference



The Early Bird registration fee is 430 €. Students may register for 190 €. Early Bird registration ends on Mar. 1, 2015! On-line registration will be available soon!


Blocks of rooms will be available at the Hilton Dresden Hotel, Steigenberger Hotel de Sax, and Ibis Hotel Königstein. Booking information will be available

Technical Contact: