Frontiers of Characterization and Metrology for Nanoelectronics: Archived Publications and Talks

Archived Publications

Archived Talks

With a very special thanks to the American Institute of Physics (AIP), we are able to provide access to these collected proceedings from the conference series free of charge. This represents over 15 years of outstanding research and overviews of critical topics collected from world-wide experts in the field of semiconductor characterization and metrology.

Please note that the links below are part of the AIP webspace. We have provided the links because they have information that may be of interest to our users. NIST does not necessarily endorse the views expressed or the facts presented on this site. Further, NIST does not endorse any commercial products that may be advertised or available on this site.

Main AIP Conference Proceedings Selection Page

• D. G. Seiler, A. C. Diebold, R. McDonald, C. M. Garner, D. Herr, R. P. Khosla, E. M. Secula, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, American Institute of Physics, Melville, NY, Vol. 1173, 398 pp. (30 September 2009)
• D. G. Seiler, A. C. Diebold, R. McDonald, C. M. Garner, D. Herr, R. P. Khosla, E. M. Secula, Frontiers of Characterization and Metrology for Nanoelectronics: 2007, American Institute of Physics, Melville, NY, Vol. 931, 603 pp. (30 September 2007)
• D. G. Seiler, A. C. Diebold, R. McDonald, C. Ayre, R. Khosla, S. Zollner, E. M. Secula, Characterization and Metrology for ULSI Technology: 2005, American Institute of Physics, Melville, NY, 11747-4502, Vol 788, 667 pp. (28 September 2005)
• D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla, E. M. Secula, Characterization and Metrology for ULSI Technology: 2003, American Institute of Physics, Melville, NY, Vol 683, 812 pp. (30 September 2003)
• D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. C. McDonald, W. M. Bullis, P. J. Smith, E. M. Secula, Characterization and Metrology for ULSI Technology: 2000, American Institute of Physics, Melville, NY, Vol 550, pp. 1-708 (1 February 2001)
• D. G. Seiler, A. C. Diebold, W. M. Bullis, T. J. Shaffner, R. C. McDonald, E. J. Walters, Characterization and Metrology for ULSI Technology, American Institute of Physics, Melville, NY, Vol 449 (1 November 1998)
• W. M. Bullis, D. G. Seiler, A. C. Diebold, Semiconductor Characterization: Present Status and Future Needs, American Institute of Physics, Woodbury, NY, 729 p. (1995) (Coming Soon!)

Archived Talks

• Presentations from the 2011 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2005 International Conference on Characterization and Metrology for ULSI Technology 
• Presentations from 2003 International Conference on Characterization and Metrology for ULSI Technology
• Presentations from 2000 International Conference on Characterization and Metrology for ULSI Technology