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Optical Metrology Programs & Projects

(showing 16 - 19 of 19)
Modeling and Simulation of Nanofabrication
Last Updated Date: 03/09/2012

Most manufacturing has historically been based on top-down fabrication and assembly.  With rapid advances in nanotechnology, there is increasing … more

NIST Calibration of SDO/EVE/ESP Rocket Instrument
Last Updated Date: 10/03/2011

NASA launched the Solar Dynamics Observatory ( SDO ) satellite on 11 Feb 2010 on a mission to study the sun. The EUV Variability Experiment ( EVE … more

Advanced Linear and Nonlinear Optical Metrology in support of next-generation Lithography
Last Updated Date: 11/09/2010

High precision linear and nonlinear optics of next-generation lithographic techniques is measured and characterized to enable these technologies. more

Fabry-Perot displacement interferometry
Last Updated Date: 10/20/2010

High-resolution Fabry-Perot interferometry is being developed and employed for mechanical displacement metrology, linking optical measurements to … more

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