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Optical Metrology Programs & Projects

(showing 16 - 18 of 18)
Diffraction effects in radiometry
Last Updated Date: 11/28/2014

We want to quantify the breakdown of geometrical optics when computing the throughput of optical systems for the purpose of calculating … more

Inkjet Gravimetry
Last Updated Date: 10/02/2012

Gravimetric and optical methods were developed to assure quantitative deposition of compounds from nano-dispense devices onto the surfaces of … more

Advanced Linear and Nonlinear Optical Metrology in support of next-generation Lithography
Last Updated Date: 11/09/2010

High precision linear and nonlinear optics of next-generation lithographic techniques is measured and characterized to enable these technologies. more

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