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Optical Metrology Programs & Projects

(showing 16 - 23 of 23)
Modeling and Simulation of Nanofabrication (Archived)
Last Updated Date: 07/15/2015

Most manufacturing has historically been based on top-down fabrication and assembly. With rapid advances in nanotechnology, there is increasing … more

Bilateral Comparison of Spectral Responsivity in the Vacuum-Ultraviolet
Last Updated Date: 04/23/2015

To compare the calibration capabilities for the spectral responsivity in the vacuum-ultraviolet spectral region between 135 nm and 250 nm, PTB and … more

Primary optical watt radiometer (POWR)
Last Updated Date: 03/30/2015

The Sensor Science Division of NIST realizes and maintains the unit of optical power (watt) with the NIST reference cryogenic radiometer, Primary … more

Lunar spectral irradiance and radiance (LUSI)
Last Updated Date: 03/30/2015

LUnar Spectral Irradiance and radiance (LUSI) is a proposed suite of instruments to radiometrically characterize the Moon for use as an on-orbit … more

Optical grating scatterometry
Last Updated Date: 11/28/2014

This program aims to develop standards, methods, and modeling for assessing the periodic structures using optical reflectance and transmittance … more

Optical scattering from surfaces
Last Updated Date: 11/28/2014

We study how material properties, surface topography, and contaminants affect the distribution of light scattered from surfaces. Our aim is to … more

Diffraction effects in radiometry
Last Updated Date: 11/28/2014

We want to quantify the breakdown of geometrical optics when computing the throughput of optical systems for the purpose of calculating … more

Inkjet Gravimetry
Last Updated Date: 10/02/2012

Gravimetric and optical methods were developed to assure quantitative deposition of compounds from nano-dispense devices onto the surfaces of … more

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