The MSEL Microscopy Facility is jointly administered by the Metallurgy and Ceramics Divisions of the Materials Science and Engineering Laboratory. The facility includes: two TEMs, three SEMs, specimen preparation equipment, and an image analysis center.

	JEOL JEM3010 UHR-TEM  300 keV accelerating voltage 0.17 nm point-to-point resolution ±15° specimen tilt Energy loss spectroscopy Energy-filtered imaging (atomic scale) X-ray microanalysis MSC-CCD image acquisition Scanning TEM capability High temperature holder Analytical specimen holder
	Hitachi S-4700-II FE-SEM  1 to 30 keV accelerating voltage 1.5 nm resolution at 30 keV 2.5 nm resolution at 1 keV 70° specimen tilt Electron back-scatter detector (CCD) system Phase ID capability X-ray microanalysis Specimen sizes up to 150 mm diameter wafer
	FEI CM30 TEM  300 keV accelerating voltage 0.22 nm point-to-point resolution ±40° specimen tilt X-ray microanalysis Parallel energy loss spectroscopy CCD camera High temperature double-tilt holder Low temperature single-tilt holder Analytical double-tilt holder
	JEOL JSM6400 SEM  5 to 30 keV accelerating voltage 5 nm resolution at 30 keV Electron back-scatter detector system Phase ID capability >70° specimen tilt X-ray microanalysis
	Specimen Preparation  VCR Dimpler Dimple Grinder Tripod wedge polishers Precision ion-polishing system (PIPS) XLA2000 low angle ion mill (w/cold stage, ion termination) Duo ion mill (w/LN2 cold stage) Ultrasonic disc cutter Diamond blade wafer cutter Optical microscopes with digital image acquisition
	Image Analysis  PC and Mac workstations Accelrys image simulation software 4800 ppi (14-bit) image scanner Dye-sublimation printers Lots o' software Coffee...