Nanomechanical Properties Group

MEMS and NEMS Mechanical Reliability Measurements — Our objective is to develop new mechanical tests structures and methodologies based on commercial and pre-commercial MEMS manufacturing methods, and new analytical reliability prediction tools, in … Nanoindentation Measurements and Standards — We develop measurement methods, standard reference materials and data, and traceable calibration techniques for quantitative mechanical property measurement at small scales. Accurate measurement of … Nanoparticle Metrology and Standards for Biomedical Applications and Health — Our goal is to develop certified reference materials, standard test methods, measurement protocols, and critical data for the physicochemical characterization of engineered and multifunctional … Piezospectroscopy Measurements and Standards — Our objective is to develop accurate measurement methods for the nano-scale stress distributions and surface defects that control device performance and reliability (performance over service life) … Scanned Probe Microscopy Measurements and Standards — Our goal is to develop standard reference materials and quantitative, reproducible, measurement methods and protocols for scanned probe microscopes, to enable accurate dimensional, force, and …