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Chengqing Wang, Ph.D.

Research Interests

Novel measurement methods based on small angle X-ray scattering (SAXS) for dimensional metrology in advanced semiconductor fabrication.

Professional Affiliations

American Physical Society
The International Society for Optical Engineering (SPIE)
Sigma Xi 

Photo of Chengqing Wang

Position:

Guest Researcher
Polymers Division
Electronics Materials

Employment History:

2005 to Present: Guest Researcher, Electronics Materials Group, Polymers Division, NIST

Education:

Ph.D., Chemistry, the Chinese University of Hong Kong, 2004

B.S.E., Polymer Science and Engineering, University of Science and Technology of China, 1998

Contact

Phone: 301-975-5221
Email: chengqing.wang@nist.gov
Fax: 301-975-3928