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Research InterestsNovel measurement methods based on small angle X-ray scattering (SAXS) for dimensional metrology in advanced semiconductor fabrication. Professional AffiliationsAmerican Physical Society |
![]() Position: Guest Researcher
Polymers Division Electronics Materials Employment History:2005 to Present: Guest Researcher, Electronics Materials Group, Polymers Division, NIST Education:Ph.D., Chemistry, the Chinese University of Hong Kong, 2004 B.S.E., Polymer Science and Engineering, University of Science and Technology of China, 1998 Contact
Phone: 301-975-5221 |