Nanomanufacturing Programs/Projects in Precision Engineering Division

High-Throughput Nanometrology with Scatterfield Microscopy

Wafer Level AFM Metrology for Critical Dimension Measurements

tinted colorized micrograph above is a scanning electron micrograph of tin spheres. The micrograph was obtained using a system developed by NIST and two industrial partners that substantially increases the detail provided in SEM images

General Information:
301 975 3400 Telephone
301 948 5668 Facsimile

100 Bureau Drive, M/S 8200
Gaithersburg, MD 20899-8200