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NIST Home  >  MEL  >  Precision Engineering  >  Length Programs/Projects in Precision Engineering Division

Length Programs/Projects in Precision Engineering Division

Complex Geometry Instrumentation and Standards

Dimensional Metrology Program

Improvements in Calibrations and Uncertainty Evaluation

MicroFeature Calibration Development

Micrometer Level Surface Finish Metrology

Optical Comb and Refractometry

Optical Linescale Metrology

Overlay Instrument and Wafer Target Designs

Photomask Dimensional Metrology

Laser interferometer technology 

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Date created: June 22, 2009 | Last updated: June 22, 2009 Contact: Mel Webmaster