Nanorobotics and NEMS Measurement Science

Our main objective is the pursuit of measurement science for nanorobotics and nanoelectromechanical systems (NEMS) that will vastly improve the physical understanding of these mechanisms, and therefore accelerate innovations in these burgeoning fields. In tandem with this, the utilization of NEMS for ultra-sensitive measurement and detection in nanomanufacturing processes will also be explored.

Although still in its infancy, the field of nanorobotics has the prospect of addressing a number of critical problems related to nanomanufacturing, biomedical research, and integrated nanotechnologies. As viewed in this project, nanorobots are mechanisms that can sense and manipulate the nanoscale environment using a combination of embedded sensors, actuators, control systems, and primitive logic. These robots may be tens of micrometers in size but will be composed of subcomponents with nanoscale dimensions. One of the most promising technologies for developing nanorobots is the field of nanoelectromechanical systems (NEMS), which is also in its early stages of development. As a result, this project simultaneously focuses on measurement science for nanorobotics and NEMS, with an emphasis in the following areas:

Nanorobot and NEMS Displacement and Force Metrology

Nanorobots and NEMS are capable of unprecedented motion resolution and rates. However, measuring their displacement with sufficient precision is a significant challenge. Instrumentation and methods based on near-field and far-field optics are being developed that will provide traceable displacement measurements with sub-angstrom resolution and ultra-high frequency (UHF) bandwidth. Similarly, measuring the stiffness of nanorobots and NEMS is critical to understanding their dynamic behavior. Therefore, methods for measuring stiffness through simultaneous force and displacement measurements are being pursued, including approaches based on atomic force microscopy and microscale force sensors. 

NEMS Mechanics and Scaling

The mechanics of structures at the nanoscale are not fully understood due to a transition from continuum behavior to atomistic behavior, presenting a serious limitation for designers of nanorobots and NEMS. Furthermore, the scaling laws that define the capabilities of the various approaches for sensing and actuating at the nanoscale have largely gone unexplored. Using the measurement science developed for nanorobotics and NEMS along with innovations in modeling at the nanoscale, this project strives to answer many of these open questions regarding mechanics and scaling. 

Sensing and Detection with NEMS

NEMS present many opportunities for sensing and detection due to their small mass, low stiffness, and high bandwidth, among many other features. As a result, NEMS are being pursued as a platform for measuring critical parameters in nanomanufacturing processes, including deposition rates, material elasticity, material density, and localized temperatures. Advanced control systems that can maximize the sensitivity of NEMS through quality factor enhancement and feedback cooling will also be investigated.