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Programmatic/Technical Accomplishments
Excellent Ion-beam-based Lithography Results with the Helium Ion Microscope
Hydrogen silsesquioxane (HSQ) is a negative-tone electron resist that allows direct writing of etch-resistant silicon oxide nanostructures with low line-edge roughness. However, due to its low contrast, patterning high resolution, densely packed nanostructures in HSQ has been a challenge. In cooperation with Massachusetts Institute of Technology (MIT), a new method to form very small printed HSQ resist features on silicon (Si) substrates was developed and implemented on the NIST Orion Helium Ion Microscope (HIM). This new method has resulted in well formed, 10 nm wide lines arranged into 20 nm pitch dense patterns and 10 nm diameter dense posts structures with 3 to 1 aspect ratio. The system works with a Nanometer Pattern Generation System (NPGS) Nabity lithography controller and is expected to yield even smaller structures once the optimization of the procedure is completed.
Contact: Andras E. Vladar 301 975 2399
Interactions
Lockheed-Martin Visits NIST
MEL hosted a contingency of visitors from Lockheed-Martin. They were interested in visiting NIST to explore collaborations in the area of nanotechnology. Sharon Smith, Director of Advanced Technology of Lockheed Martin Corporation led the Lockheed-Martin group. The Lockheed-Martin visitors were using nanomanufacturing, nanotechnology, and nanoelectronics to improve their products. With those topics in mind, the group received presentations from Rob Ivester (NIST overview), Howard Harary (MEL overview), Eric Amos, (MSEL overview), Bob Celotta (CNST overview), Michael Postek (MEL programs in nanometrology and nanomanufacturing), Jack Martinez (OMP overview) and David Stieren (MEP overview). In the afternoon, laboratory tours were held.
Contact Michael Postek 301 975 2299
Congressional Briefing
Michael Postek, a MEL Division Chief, was invited to attend a briefing before the U.S. Congressional Nanotechnology Caucus entitled “Nanotechnology and the Public: New Data for Decision Makers” by Lucas Moller of Senator Wyden’s staff. Michael M. Crow, president of Arizona State University, and 13 recognized scholars studying societal implications of nanotechnology briefed the U.S. Congressional Nanotechnology Caucus, with an attendance of about 100 visitors, congressional staff and other federal policymakers. The Caucus co-chairs are Sen. Ron Wyden (D-OR), Sen. Richard Burr (R-NC), Rep. Bart Gordon (D-TN), and Rep. Ralph Hall (R-TX). The briefing was organized by the NSF-funded Center for Nanotechnology in Society at Arizona State University (CNS-ASU), in collaboration with the Congressional Nanotechnology Caucus and the Woodrow Wilson International Center for Scholars, and was moderated by David H. Guston, professor of political science, co-director of the Consortium for Science, Policy and Outcomes, and director of the NSF-funded CNS-ASU. This Briefing took place at the Dirksen Senate Office Building, Room 562, Constitution Avenue & First Street, NE, in Washington DC.
Contact Michael Postek 301 975 2299
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