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Characterization of Coplanar Waveguide on Epitaxial Layers

Published

Author(s)

Dylan F. Williams, J. M. Belquin, Alain Spisser, Alain Cappy, G. Dambrine

Abstract

We examine the effect of thin AlInAs/GaInAs epitaxial layers on the propagation of electrical signals in coplanar waveguide transmission lines fabricated on semi-insulating indium phosphide substrates. We show that argon isolation implants effectively reduce conduction losses in these layers to negligible levels at radio, microwave, and millimeter-wave frequencies.
Citation
Electronics Letters
Volume
33
Issue
17

Citation

Williams, D. , Belquin, J. , Spisser, A. , Cappy, A. and Dambrine, G. (1997), Characterization of Coplanar Waveguide on Epitaxial Layers, Electronics Letters, [online], https://doi.org/10.1049/el:19970969 (Accessed April 19, 2024)
Created August 14, 1997, Updated November 10, 2018