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Publication Citation: Optical volumetric inspection of sub-20 nm patterned defects with wafer noise

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Author(s): Bryan M. Barnes; Francois R. Goasmat; Martin Y. Sohn; Hui H. Zhou; Richard M. Silver; Andras Vladar; Abraham Arceo;
Title: Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
Published: April 02, 2014
Abstract: We have previously introduced a new data analysis method that more thoroughly utilizes scattered optical intensity data collected during defect inspection using bright-field microscopy. This volumetric approach allows conversion of focus resolved 2-D collected images into 3-D volumes of intensity information and also permits the use of multi-dimensional processing and thresholding techniques to enhance defect detectability. In this paper, the effects of wafer noise upon detectability using volumetric processing are assessed with both simulations and experiments using the SEMATECH 9 nm node intentional defect array. The potential extensibility and industrial application of this technique are evaluated.
Conference: Metrology, Inspection, and Process Control for Microlithography
Proceedings: Proceedings of the SPIE
Volume: 9050
Pages: 10 pp.
Location: San Jose, CA
Dates: February 23-27, 2014
Keywords: wafer noise; defect inspection; volumetric processing; defect metrology; three-dimensional image processing
Research Areas: Metrology and Standards for Manufacturing Processes, Inspection, Optical microscopy, Nanofabrication, Nanomanufacturing, and Nanoprocessing, Imaging
DOI: http://dx.doi.org/10.1117/12.2048231  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)