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|Author(s):||Jason T. Ryan; Jason P. Campbell; Jibin Zou; Kin P. Cheung; Richard Southwick; Anthony Oates; Rue Huang;|
|Title:||Constant Shape Factor Frequency Modulated Charge Pumping (FMCP)|
|Published:||March 03, 2014|
|Abstract:||Abstract, We examine the seemingly frequency-dependent gate leakage current component of frequency-modulated charge pumping and show it to be a measurement artifact. If untreated, this results in erroneous defect density extractions. We present a constant shape factor methodology to suppress this component such that frequency-modulated charge pumping is well positioned for advanced device defect characterization.|
|Conference:||IEEE International Integrated Reliability Workshop|
|Proceedings:||IEEE International Integrated Reliability Workshop Final Report|
|Pages:||pp. 21 - 25|
|Location:||South Lake Tahoe, CA|
|Dates:||October 14-18, 2013|
|Research Areas:||Semiconductors, Analysis Tools and Techniques, Characterization|
|PDF version:||Click here to retrieve PDF version of paper (599KB)|