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Publication Citation: Constant Shape Factor Frequency Modulated Charge Pumping (FMCP)

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Author(s): Jason T. Ryan; Jason P. Campbell; Jibin Zou; Kin P. Cheung; Richard Southwick; Anthony Oates; Rue Huang;
Title: Constant Shape Factor Frequency Modulated Charge Pumping (FMCP)
Published: March 03, 2014
Abstract: Abstract, We examine the seemingly frequency-dependent gate leakage current component of frequency-modulated charge pumping and show it to be a measurement artifact. If untreated, this results in erroneous defect density extractions. We present a constant shape factor methodology to suppress this component such that frequency-modulated charge pumping is well positioned for advanced device defect characterization.
Conference: IEEE International Integrated Reliability Workshop
Proceedings: IEEE International Integrated Reliability Workshop Final Report
Pages: pp. 21 - 25
Location: South Lake Tahoe, CA
Dates: October 14-18, 2013
Research Areas: Semiconductors, Analysis Tools and Techniques, Characterization
PDF version: PDF Document Click here to retrieve PDF version of paper (599KB)