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Publication Citation: Highly reproducible and reliable metal/graphene contact by UV-Ozone treatment

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Author(s): Wei Li; Christina A. Hacker; Guangjun Cheng; Angela R. Hight Walker; Curt A. Richter; David J. Gundlach; Yiran Liang; boyuan Tian; Xuelei Liang; Lianmao Peng;
Title: Highly reproducible and reliable metal/graphene contact by UV-Ozone treatment
Published: March 17, 2014
Abstract: Resist residue from the device fabrication process is a significant source of contamination at the metal/graphene contact interface. Ultraviolet Ozone (UVO) treatment is proven here, by X-ray photoelectron spectroscopy (XPS) and Raman measurement, to be an effective way of cleaning the metal/graphene interface. Electrical measurements of devices which were fabricated by using UVO treatment of the metal/graphene contact region show that stable and reproducible low resistance metal/graphene contacts are obtained and the electrical properties of the graphene channel remain unaffected.
Citation: Journal of Applied Physics
Volume: 115
Issue: 11
Pages: 5 pp.
Keywords: graphene, metal/graphene contact, residue
Research Areas: Nanoelectronics and Nanoscale Electronics