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Publication Citation: Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable

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Author(s): Janet M. Cassard; Jon C. Geist; John A. Kramar;
Title: Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable
Published: May 14, 2014
Abstract: The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.
Citation: ECS Transactions
Keywords: homogeneous, MEMS 5-in-1, MEMS Calculator, Reference Material, RM 8096, RM 8097, stability, test chip
Research Areas: Standard Reference Materials
PDF version: PDF Document Click here to retrieve PDF version of paper (242KB)