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Publication Citation: Gallium Nitride Nanowire Probe for Near-Field Scanning Microwave Microscopy

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Author(s): Joel C. Weber; Paul T. Blanchard; Aric W. Sanders; Atif Imtiaz; Thomas M. Wallis; Kevin J. Coakley; Kristine A. Bertness; Pavel Kabos; Norman A. Sanford; Victor M. Bright;
Title: Gallium Nitride Nanowire Probe for Near-Field Scanning Microwave Microscopy
Published: January 15, 2014
Abstract: We report on the fabrication of a GaN nanowire probe for near-field scanning microwave microscopy. A single nanowire was Pt-bonded to a commercial Si cantilever prior to evaporation of a Ti/Al coating to provide a microwave signal pathway. Testing over a microcapacitor calibration sample shows the probe to have capacitance resolution of at least 0.7 fF with improved sensitivity and reduced uncertainty compared with a commercial microwave probe. High strength of the defect-free nanowire enabled it to maintain a tip radius of 150 nm after multiple contact-mode scans while demonstrating nanometer-scale topographical resolution.
Citation: Applied Physics Letters
Volume: 104
Issue: 2
Pages: 4 pp.
Research Areas: Nanoelectromechanical systems (NEMS)
DOI: http://dx.doi.org/10.1063/1.4861862  (Note: May link to a non-U.S. Government webpage)