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Publication Citation: Methods for Performance Evaluation of Single Axis Positioning Systems: A New Standard

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Author(s): Ronnie R. Fesperman; Nathan Brown; Kevin Elliott; Jonathan D. Ellis; Axel Grabowski; Steve Ludwick; Serge Maneuf; Brian O'Connor; Shane Woody;
Title: Methods for Performance Evaluation of Single Axis Positioning Systems: A New Standard
Published: October 25, 2013
Abstract: Many new high-precision linear and angular positioning systems are being used in emerging micro- and nanotechnology applications. Measuring and certifying the performance of these systems with off-the-shelf instrumentation and test methods suggested by existing performance standards can be challenging. Manufacturers and users are recognizing this challenge and are developing their own internal methods for characterizing positioning system performance. Performance specifications based on these diverse and independent methods is leading to customer confusion and ambiguity. Members of industry, academia, and government have recognized this challenge and the need for a new standard for measurement methods that specifically address the performance of single axis positioning systems. In this paper, we discuss factors affecting the accurate characterization and communication of positioning system performance. The scope for a standard for the performance evaluation of single axis positioning systems is presented and the new test methods being considered for inclusion in this standard are briefly described.
Conference: 28th ASPE Annual Meeting
Proceedings: Proceedings of the ASPE Annual Meeting
Volume: 56
Pages: pp. 498 - 503
Location: Saint Paul, MN
Dates: October 20-25, 2013
Keywords: Standard; Metrology; Positioning Systems; Performance Characterization
Research Areas: Metrology and Standards for Manufacturing Equipment
PDF version: PDF Document Click here to retrieve PDF version of paper (144KB)