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Publication Citation: Reliability Monitoring For Highly Leaky Devices

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Author(s): Jason T. Ryan; Jason P. Campbell; Kin P. Cheung; John S. Suehle; Richard Southwick; Anthony Oates;
Title: Reliability Monitoring For Highly Leaky Devices
Published: May 31, 2013
Abstract: We demonstrate a new charge pumping (CP) methodology, frequency modulated CP (FMCP), that robustly treats metrology challenges associated with high gate leakage current. By moving to an AC coupled measurement, we are able to easily resolve small CP signals despite excessively high gate leakage current backgrounds. We demonstrate the utility of FMCP as a reliability monitoring tool in highly scaled and highly leaky devices.
Conference: IEEE International Reliability Physics Symposium
Proceedings: Proceedings of the IEEE International Reliability Physics Symposium
Pages: pp. 2D.5.1 - 2D.5.4
Location: Monterey, CA
Dates: April 15-18, 2013
Research Areas: Semiconductors, Characterization