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NIST Authors in Bold
|Author(s):||Jing Qin; Hui Zhou; Bryan M. Barnes; Ronald G. Dixson; Richard M. Silver;|
|Title:||3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties|
|Published:||June 23, 2013|
|Abstract:||A new approach that involves parametric fitting of 3-D scattered field with electromagnetic simulation, Fourier domain normalization, and uncertainties analysis is presented to rigorously analyze 3-D through-focus optical images of targets that scatter a continuum of frequency components|
|Conference:||Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)|
|Proceedings:||OSA Technical Digests|
|Dates:||June 24-28, 2013|
|Keywords:||optical metrology, parametric fitting|
|Research Areas:||Optical Metrology|
|DOI:||http://dx.doi.org/10.1364/AOPT.2013.JTu4A.32 (Note: May link to a non-U.S. Government webpage)|