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Publication Citation: 3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties

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Author(s): Jing Qin; Hui Zhou; Bryan M. Barnes; Ronald G. Dixson; Richard M. Silver;
Title: 3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties
Published: June 23, 2013
Abstract: A new approach that involves parametric fitting of 3-D scattered field with electromagnetic simulation, Fourier domain normalization, and uncertainties analysis is presented to rigorously analyze 3-D through-focus optical images of targets that scatter a continuum of frequency components
Conference: Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
Proceedings: OSA Technical Digests
Pages: 2 pp.
Location: Alexandria, VA
Dates: June 24-28, 2013
Keywords: optical metrology; parametric fitting
Research Areas: Optical Metrology
DOI: http://dx.doi.org/10.1364/AOPT.2013.JTu4A.32  (Note: May link to a non-U.S. Government webpage)