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Publication Citation: Accuracy and Resolution of Nanoscale Strain Measurement Techniques

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Author(s): William A. Osborn; Lawrence H. Friedman; Mark D. Vaudin; Stephan J. Stranick; Michael S. Gaither; Justin M. Gorham; Victor Vartanian; Robert F. Cook;
Title: Accuracy and Resolution of Nanoscale Strain Measurement Techniques
Published: March 26, 2013
Abstract:
Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics
Location: Gaithersburg, MD
Dates: March 25-28, 2013
Keywords: Strain Measurement; Stress Measurement; CRM; EBSD; XRD; SiGe; Reference Material
Research Areas: Nanometrology, Semiconductor Materials