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Publication Citation: Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy

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Author(s): Craig D. McGray; Samuel M. Stavis; Jon C. Geist;
Title: Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Published: March 25, 2013
Abstract:
Proceedings: Frontiers of Characterization and Metrology for Nanoelectronics
Location: Gaithersburg, MD
Dates: March 25-28, 2013
Keywords: Uncertainty, Super-Resolution, Fluorescence Microscopy, Localization Precision, MEMS, Kinematics, Nanoscale, Nanometer
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements