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|Author(s):||Jun-Feng Song; Thomas B. Renegar; Johannes A. Soons; Balasubramanian Muralikrishnan; John S. Villarrubia; Xiaoyu A. Zheng; Theodore V. Vorburger;|
|Title:||The Effect of Tip Size in Calibration of Surface Roughness Specimens with Rectangular Profiles|
|Published:||September 02, 2013|
|Abstract:||For the calibration of rectangular and trapezoidal profile roughness specimens, stylus tip will increase profile peak width and decrease valley width, which may cause the Ra changes (either increase or decrease, depends on the profile shape). Sometimes the changes are even larger than the calibration uncertainties. That raises a question as to whether the measured surface parameters should be corrected for the significant tip size effect.|
|Citation:||Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology|
|Keywords:||Surface metrology, roughness calibration, rectangular profile, stylus radius, Type C roughness specimen.|
|DOI:||http://dx.doi.org/10.1016/j.precisioneng.2013.07.0 (Note: May link to a non-U.S. Government webpage)|
|PDF version:||Click here to retrieve PDF version of paper (651KB)|