The Effect of Tip Size in Calibration of Surface Roughness Specimens with Rectangular Profiles

Published

September 2, 2013

Author(s)

Jun-Feng Song, Thomas B. Renegar, Johannes A. Soons, Balasubramanian Muralikrishnan, John S. Villarrubia, Xiaoyu A. Zheng, Theodore V. Vorburger

Abstract

For the calibration of rectangular and trapezoidal profile roughness specimens, stylus tip will increase profile peak width and decrease valley width, which may cause the Ra changes (either increase or decrease, depends on the profile shape). Sometimes the changes are even larger than the calibration uncertainties. That raises a question as to whether the measured surface parameters should be corrected for the significant tip size effect.

Citation

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Volume

37

Issue

4

Pub Type

Journals

Download Paper

https://doi.org/10.1016/j.precisioneng.2013.07.0

Keywords

Surface metrology, roughness calibration, rectangular profile, stylus radius, Type C roughness specimen.

Citation

Song, J. , Renegar, T. , Soons, J. , Muralikrishnan, B. , Villarrubia, J. , Zheng, X. and Vorburger, T. (2013), The Effect of Tip Size in Calibration of Surface Roughness Specimens with Rectangular Profiles, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, [online], https://doi.org/10.1016/j.precisioneng.2013.07.0 (Accessed April 19, 2024)