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|Author(s):||Chukwudi A. Okoro; Jungjoon Ahn; Meagan V. Kelso; Pavel Kabos; Joseph J. Kopanski; Yaw S. Obeng;|
|Title:||Measurement Science for "More-Than-Moore" Technology Reliability Assessments|
|Published:||October 12, 2012|
|Abstract:||In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.|
|Conference:||222nd Meeting of ECS , The Electrochemical Society|
|Proceedings:||More than Moore|
|Dates:||October 7-12, 2012|
|Keywords:||reliability, more-than-moore, functional diversification|
|Research Areas:||Semiconductors, Single Electronics|
|PDF version:||Click here to retrieve PDF version of paper (209KB)|