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Publication Citation: Measurement Science for "More-Than-Moore" Technology Reliability Assessments

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Author(s): Chukwudi A. Okoro; Jungjoon Ahn; Meagan V. Kelso; Pavel Kabos; Joseph J. Kopanski; Yaw S. Obeng;
Title: Measurement Science for "More-Than-Moore" Technology Reliability Assessments
Published: October 12, 2012
Abstract: In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.
Conference: 222nd Meeting of ECS , The Electrochemical Society
Proceedings: More than Moore
Location: Honolulu, HI
Dates: October 7-12, 2012
Keywords: reliability, more-than-moore, functional diversification
Research Areas: Semiconductors, Single Electronics
PDF version: PDF Document Click here to retrieve PDF version of paper (209KB)