Chiaramonti, A.
, Vollebregt, S.
, Ishihara, R.
, van, J.
and Beenakker, K.
(2013),
Integrating carbon nanotubes as vias in a monolithic 3DIC process, 2012 International Conference on Solid State Devices and Materials, Kyoto, -1
(Accessed April 19, 2024)
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Integrating carbon nanotubes as vias in a monolithic 3DIC process
Published
Author(s)
, Sten Vollebregt, R. Ishihara, Johan van der Cingel , Kees Beenakker
Proceedings Title
2012 International Conference on Solid State Devices and Materials
Conference Dates
September 25-27, 2012
Conference Location
Kyoto
Pub Type
Conferences
Citation
Created March 21, 2013, Updated February 19, 2017