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Publication Citation: Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures

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Author(s): Yong Sik Kim; Nicholas G. Dagalakis; Satyandra K. Gupta;
Title: Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures
Published: August 15, 2012
Abstract: This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 Degree of Freedom (DOF) in-plane positioning stages and one existing 1 DOF out-of-plane actuator are merged into one system for 3 DOF motions. The 1 DOF stage has a platform to embed other systems. For a successful combination of three independent systems, two nested structures are adapted as a serial kinematic mechanism. With nested structures, one 1 DOF in-plane positioning stage is embedded into the other 1 DOF in-plane stage for in-plane translational motions along the X and Y axes. And then, one 1 DOF out-of-plane actuator is embedded for the translational motion along the Z axis. The proposed 3 DOF system has demonstrated ability to generate at least 20 μm along X, Y and Z axes, respectively. The cross talk between the three axes is also measured and is less than 4 percent of the intended displacement.
Proceedings: ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)
Pages: 7 pp.
Location: Chicago, IL
Dates: August 12-15, 2012
Keywords: Nanopositioning; MEMS actuator; 3 DOF
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)