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Publication Citation: Experimentally Based Methodology for Charge Pumping Bulk Defect Trapping Correction

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Author(s): Jason T. Ryan; Richard G. Southwick; Jason P. Campbell; Kin P. Cheung; Chadwin Young; John S. Suehle;
Title: Experimentally Based Methodology for Charge Pumping Bulk Defect Trapping Correction
Published: December 15, 2011
Abstract: We develop a simple experimental approach to remove bulk trap contributions from charge pumping data collected on devices which suffer from large amounts of bulk dielectric electron trapping. The approach is more desirable and easier to implement than other simulation/device modeling based approaches. We demonstrate the approach using HfO2 based MOSFETs. Additionally, we provide an explanation for the smaller than expected bulk trap contribution to charge pumping current.
Conference: International Integrated Reliability Workshop
Proceedings: International Integrated Reliability Workshop Final Report
Pages: pp. 23 - 26
Location: South Lake Tahoe, CA
Dates: October 16-21, 2011
Research Areas: Characterization