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Publication Citation: Measurement of the diameter variation and refractive index inhomogeneity of a fused silica sphere using four-surface phase-shifting interferometry

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Author(s): Chu-Shik Kang; Ulf Griesmann; Johannes A. Soons;
Title: Measurement of the diameter variation and refractive index inhomogeneity of a fused silica sphere using four-surface phase-shifting interferometry
Published: September 09, 2012
Abstract: The diameter variation and refractive index inhomogeneity of a fused silica sphere were measured with a frequency-shifting Fizeau interferometer in a four-surface configuration. The phase-shifting algorithms to analyze the interference signals for each basic cavity were designed using the characteristic polynomial theory. We describe the experimental setup and preliminary results.
Proceedings: XX IMEKO World Congress; Metrology for Green Growth
Location: Busan, -1
Dates: September 9-14, 2012
Keywords: phase-shifting interferometry; characteristic polynomial; sphere measurement; diameter variation; refractive index inhomogeneity
Research Areas: Measurement Solutions, Instrumentation