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PUBLICATIONS

Calibration Techniques for Scanning Microwave Microscopy

Published

Author(s)

Thomas M. Wallis, Atif A. Imtiaz, Alexandra Curtin, Pavel Kabos, H. P. Huber, Joseph J. Kopanski, F. Kienberger

Abstract

Two techniques are described for calibrating a scanning microwave microscope (SMM). The first technique enables spatially-resolved absolute capacitance measurements on the attofarad-to-femtofarad scale. The second technique enables profiling or dopant concentrations between 10 16 to 10 20 dopant atoms per CM3, notably, the sensitivity of the instrument to different dopant concentrations may be tuned by adjusting the SMM operating frequency, both calibration techniques involved the use of specialized reference samples, in conjunction with modeling and data analysis
Conference Dates
July 1-6, 2012
Conference Location
Washington, DC
Conference Title
Conference on Precision Electromagnetics Measurements
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/CPEM.2012.6251036

Keywords

Calibration, Capacitance, Doping, Scanning probe Microscopy, semiconductor materials.
Metrology

Citation

Wallis, T. , Imtiaz, A. , Curtin, A. , Kabos, P. , Huber, H. , Kopanski, J. and Kienberger, F. (2012), Calibration Techniques for Scanning Microwave Microscopy, Conference on Precision Electromagnetics Measurements, Washington, DC, [online], https://doi.org/10.1109/CPEM.2012.6251036 (Accessed April 19, 2024)

Created July 1, 2012, Updated January 27, 2020