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Publication Citation: High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers

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Author(s): Norman A. Sanford; F Brizuela; Kristine A. Bertness;
Title: High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
Published: July 21, 2008
Abstract: Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Citation: Journal of Physics Conference Proceedings
Volume: 86
Issue: 1
Pages: pp. 1 - 3
Keywords: GaN nanowires, nano-mechanics, nano-mechanical resonators, electro-mechanical resonators, piezoresistivity
Research Areas: Nanowires, Nanomaterials, Nanomanufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (463KB)