| Author(s): |
Norman A. Sanford; F Brizuela; Kristine A. Bertness; |
| Title: |
High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers |
| Published: |
July 21, 2008 |
| Abstract: |
Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of tabletop zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot. |
| Citation: |
Journal of Physics Conference Proceedings |
| Volume: |
86 |
| Issue: |
1 |
| Pages: |
pp. 1 - 3 |
| Keywords: |
GaN nanowires, nano-mechanics, nano-mechanical resonators, electro-mechanical resonators, piezoresistivity |
| Research Areas: |
Nanowires, Nanomaterials, Nanomanufacturing |
| PDF version: |
 Click here to retrieve PDF version of paper (452KB) |
