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Publication Citation: Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs

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Author(s): S. Perkowitz; David G. Seiler; W M. Bullis;
Title: Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs
Published: December 31, 1995
Abstract:
Proceedings: Semiconductor Characterization - Present Status and Future Needs
Pages: pp. 422 - 427
Location: Gaithersburg, MD
Research Areas: