Imtiaz, A.
, Wallis, T.
, Lim, S.
, Chisum, J.
, Popovic, Z.
and Kabos, P.
(2010),
Near-Field Antenna as a Scanning Microwave Probe for Characterization of Materials and Devices, EuCAP 2010: The 4th European Conference on Antennas and Propagation, Barcelona, Spain, Barcelona, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905030
(Accessed April 19, 2024)
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Near-Field Antenna as a Scanning Microwave Probe for Characterization of Materials and Devices
Published
Author(s)
, , , , Zoya Popovic,
Abstract
The Scanning Microwave Probe (SMP) is emerging as an important broadband metrology tool for characterizing the materials and devices in the micron and sub-micron length scales in the frequency range of 10 MHz to 110 GHz. In this document we establish three important characteristics ofSMP: 1) the sensitivity of this tool to the materials property by showing data in the conductivity range of 0 to 2000 S/cm in a stratified medium )2 the breaking of the λ/2 barrier for spatial-resolution where we report measurement of 1υm spatially resolved features at the frequency of 4.6 GHz on SiGe sample and 3) detection of subsurface structures under 2 metal layers in an 8-layer CMOS IC with a measured 0.3% change in Q-factor at 1.8 GHz.Proceedings Title
EuCAP 2010: The 4th European Conference on Antennas and Propagation, Barcelona, Spain
Conference Dates
April 12-16, 2010
Conference Location
Barcelona
Pub Type
Conferences
Download Paper
Keywords
Near-field antenna, microwaves, scanning microwave probe, metrology
Citation
Created April 12, 2010, Updated February 19, 2017