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Publication Citation: Frequency-Dependent Charge-Pumping: The Depth Question Revisited

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Author(s): Fan Zhang; Kin P. Cheung; Jason P. Campbell; John S. Suehle;
Title: Frequency-Dependent Charge-Pumping: The Depth Question Revisited
Published: May 01, 2010
Abstract: A popular defect depth-profiling technique, frequency-dependent charge-pumping is carefully re-examined. Without complicated math of modeling, the physics behind the technique is examined clearly. It is shown that there is no unique relationship between the measurement frequency and the probed depth. The conclusion is that frequency-dependent charge-pumping is not a defect depth-profiling technique.
Proceedings: IEEE International Reliability Physics Symposium Proceedings
Pages: 3 pp.
Location: Anaheim, CA
Dates: May 2-6, 2010
Keywords: frequency-dependent; charge-pumping; defect; depth profiling
Research Areas: Electron Physics
PDF version: PDF Document Click here to retrieve PDF version of paper (230KB)