Publication Citation
NIST Authors in Bold
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| Author(s): | Robert G. Downing; David S. Simons; George P. Lamaze; Richard M. Lindstrom; Robert R. Greenberg; Rick L. Paul; Susannah B. Schiller; William F. Guthrie; |
|---|---|
| Title: | Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers |
| Published: | November 01, 2007 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology |
| Research Areas: |