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Publication Citation: Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers

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Author(s): Robert G. Downing; David S. Simons; George P. Lamaze; Richard M. Lindstrom; Robert R. Greenberg; Rick L. Paul; Susannah B. Schiller; William F. Guthrie;
Title: Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers
Published: November 01, 2007
Abstract:
Citation: Journal of Vacuum Science and Technology
Research Areas: