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|Author(s):||Ward L. Johnson; Sudook A. Kim; Roy H. Geiss; Colm Flannery; Paul R. Heyliger; Christopher L. Soles; Wen-Li Wu; Chengqing C. Wang; Christopher M. Stafford; B D. Vogt;|
|Title:||Elastic constants and dimensions of imprinted polymeric nanolines determined from Brillouin light scattering|
|Published:||January 18, 2010|
|Abstract:||Elastic constants and cross-sectional dimensions of imprinted nanolines of poly(methyl methacrylate) (PMMA) on silicon are determined nondestructively from finite-element inversion analysis of dispersion curves of hypersonic acoustic modes of these nanolines measured with Brillouin light scattering (BLS). The results for the cross-sectional dimensions, under the simplifying assumption of vertical sides and a semicircular top, are found to be consistent with dimensions determined from critical-dimension small-angle xray scattering (CD-SAXS) measurements. The elastic constants C_11 and C_44 are found to be, respectively, 11.6 % and 3.1 % lower than their corresponding values in bulk PMMA. This result is consistent with thickness-dependent changes in Young's modulus determined from quasi-static buckling measurements on PMMA films with lower molecular weights. This study provides the first evidence of size-dependent effects on hypersonic elastic properties of polymers.|
|Pages:||pp. 1 - 8|
|Keywords:||BLS, Brillouin light scattering, elastic constants, finite element analysis, nanoimprint lithography, nanolines, PMMA,|
|Research Areas:||Characterization, Nanomaterials, Characterization, Nanometrology, and Nanoscale Measurements|
|PDF version:||Click here to retrieve PDF version of paper (669KB)|