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Publication Citation: Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation

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Author(s): Wei Chu; Joseph Fu; Theodore V. Vorburger;
Title: Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation
Published: August 13, 2010
Abstract:
Citation: Measurement Science & Technology
Volume: 21
Issue: 10
Pages: pp. 1 - 5
Research Areas: Atomic force microscopy (AFM)