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Publication Citation: Geometric effects when measuring small holes with micro contact probes.

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Author(s): Jack A. Stone Jr; Balasubramanian Muralikrishnan; Chittaranjan Sahay;
Title: Geometric effects when measuring small holes with micro contact probes.
Published: March 01, 2011
Abstract: A coordinate measuring machine with a suitably small probe can be used to measure micro-features such as the diameter and form of small holes (often about 100 micrometers in diameter). When measuring small holes, the clearance between the probe tip and the part is sometimes nearly as small as other characteristic lengths associated with the measurement. Under these circumstances, the basic geometry of the measurement is much different than it is for the measurement of a macroscopic object. Various geometric errors are greatly magnified, and consequently sources of error that are totally irrelevant when measuring macroscopic artifacts can become important. In this article we discuss effects associated with misalignment or non-orthogonality of the probe axes, probe-tip radius compensation, and mechanical filtering.
Citation: Journal of Research of the National Institute of Standards and Technology
Volume: 116
Issue: 2
Pages: pp. 573 - 587
Keywords: coordinate measuring machine; micro-feature; probe-tip compensation; mechanical filtering
Research Areas: Dimensional Metrology