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Publication Citation: Finish and Figure Metrology for Soft X­ray Optics

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Author(s): Theodore V. Vorburger; Christopher J. Evans; V W. Tsai; Joseph Fu; E. C. Williams; Ronald G. Dixson; P Sullivan; T. McWaid;
Title: Finish and Figure Metrology for Soft X­ray Optics
Published: January 01, 1997
Abstract: Abstract not available.
Proceedings: Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors
Location: Tokyo, -1
Dates: January 1, 1997
Research Areas: Metrology, Manufacturing