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Publication Citation: Repeatability of Si Concentration Measurements in Si-Doped GaN Films

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Author(s): P Chi; David S. Simons; A E. Wickenden; D D. Koleske;
Title: Repeatability of Si Concentration Measurements in Si-Doped GaN Films
Published: February 10, 1997
Abstract:
Citation: Journal of Vacuum Science and Technology A
Volume: 15
Pages: pp. 2565 - 2568
Research Areas: Chemistry