Publication Citation
NIST Authors in Bold
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| Author(s): | P Chi; David S. Simons; A E. Wickenden; D D. Koleske; |
|---|---|
| Title: | Repeatability of Si Concentration Measurements in Si-Doped GaN Films |
| Published: | February 10, 1997 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology A |
| Volume: | 15 |
| Pages: | pp. 2565 - 2568 |
| Research Areas: | Chemistry |