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Publication Citation: Computational Parameters in Simulation of Microscope Images

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Author(s): Egon Marx; James E. Potzick;
Title: Computational Parameters in Simulation of Microscope Images
Published: November 28, 2008
Abstract: The simulation of microscope images computed from scattered fields determined using integral equations depend on a number of parameters that are not related to the scatterer or to the microscope but are choices made for the computation method. The effect of different choices on the images and on the estimated line width are determined for two typical configurations.
Proceedings: PIERS Meeting
Volume: 5
Issue: 1
Pages: pp. 11 - 15
Location: Beijing, -1
Dates: March 23-27, 2009
Keywords: computational parameters; electromagnetic scattering; integral equations;lines and trenches in semiconductors; microscope images; two-dimensional scatterer
Research Areas: Metrology, Optical Physics, Manufacturing