| Author(s): |
Egon Marx; James E. Potzick; |
| Title: |
Computational Parameters in Simulation of Microscope Images |
| Published: |
November 28, 2008 |
| Abstract: |
The simulation of microscope images computed from scattered fields determined using integral equations depend on a number of parameters that are not related to the scatterer or to the microscope but are choices made for the computation method. The effect of different choices on the images and on the estimated line width are determined for two typical configurations. |
| Proceedings: |
PIERS Meeting |
| Volume: |
5 |
| Issue: |
1 |
| Pages: |
pp. 11 - 15 |
| Location: |
Beijing, -1 |
| Dates: |
March 23-27, 2009 |
| Keywords: |
computational parameters; electromagnetic scattering; integral equations;lines and trenches in semiconductors; microscope images; two-dimensional scatterer |
| Research Areas: |
Metrology, Optical Physics, Manufacturing |
