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Publication Citation: Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; R. Alvis;
Title: Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version
Published: December 31, 1997
Abstract:
Proceedings: Extended Abstracts of the Electrochemical Society
Location: Montreal, CA
Dates: May 4-9, 1997
Research Areas: