NIST logo

Publication Citation: A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

NIST Authors in Bold

Author(s): Jay F. Marchiando; Joseph J. Kopanski; J R. Lowney;
Title: A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: December 31, 1997
Abstract:
Proceedings: Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Pages: pp. 65.1 - 65.3
Location: Research Triangle Park, NC
Dates: April 6-9, 1997
Research Areas: